Browsing Theses by Author "Logan, Andrew Stephan"
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The Design, Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers for Imaging Applications
Logan, Andrew Stephan (University of Waterloo, 2010-10-01)Capacitive micromachined ultrasonic transducers (CMUTs) have proven themselves to be excellent candidates for medical ultrasonic imaging applications. The use of semiconductor fabrication techniques facilitates the fabrication ...