Browsing University of Waterloo by Subject "Pulsed PECVD"
Now showing items 1-1 of 1
-
Nanocrystalline Silicon Solar Cells Deposited via Pulsed PECVD at 150°C Substrate Temperature
(University of Waterloo, 2010-08-31)A series of experiments was carried out to compare the structural and electronic properties of intrinsic nanocrystalline silicon (nc-Si:H) thin films deposited via continuous wave (cw) and pulsed (p)-PECVD at 150°C substrate ...