Browsing University of Waterloo by Subject "Metallic oxides"
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An Intelligent Neural Network Controlled Atmospheric Pressure Spatial Atomic Layer Deposition System for Tunable Metal Oxide Thin Films
(University of Waterloo, 2018-08-22)Atmospheric pressure spatial atomic layer deposition (AP-SALD) is a novel thin film fabrication technique to create conformal and pin-hole free films. The growth rate of AP-SALD is hundreds of times greater than conventional ...