Browsing University of Waterloo by Author "Huerta Garrido, Maria Eugenia"
Now showing items 1-1 of 1
-
Experimental and Mechanistic Study of Copper Electrodeposition in the Absence and Presence of Chloride Ions and Polyethylene Glycol
Huerta Garrido, Maria Eugenia (University of Waterloo, 2007-10-24)The trend to miniaturize electronic devices has led to the development of new fabrication processes. Copper electrodeposition has been used extensively in the fabrication of microelectronic circuits due to the excellent ...