Browsing University of Waterloo by Author "Mistry, Kissan"
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In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system.
Mistry, Kissan; Jones, Alex; Kao, Manfred; Yeow, Travis; Yavuz, Mustafa; Musselman, Kevin (IOP Science, 2020-06-01)Atmospheric pressure—spatial atomic layer deposition (AP-SALD) is a promising open-air deposition technique for high-throughput manufacturing of nanoscale films, yet the nucleation and property evolution in these films has ... -
Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
Alshehri, Abdullah H.; Nelson-Fitzpatrick, Nathan; Ibrahim, Khaled H.; Mistry, Kissan; Yavuz, Mustafa; Musselman, Kevin P. (AIP Publishing, 2018-03-21)In this work, a plasma assisted atomic layer deposition system was used to deposit nitrogen-doped titanium dioxide. A simple approach was developed that requires only a nitrogen plasma and short plasma exposure times to ... -
Simulated electron affinity tuning in metal-insulator-metal (MIM) diodes
Mistry, Kissan; Yavuz, Mustafa; Musselman, Kevin P. (American Institute of Physics, 2017-04-27)Metal-insulator-metal diodes for rectification applications must exhibit high asymmetry, nonlinearity, and responsivity. Traditional methods of improving these figures of merit have consisted of increasing insulator ...