Browsing University of Waterloo by Author "Towfighian, Shahrzad"
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A Large-Stroke Electrostatic Micro-Actuator
Towfighian, Shahrzad (University of Waterloo, 2011-01-17)Parallel-plate electrostatic actuators driven by a voltage difference between two electrodes suffer from an operation range limited to 30% of the gap that has significantly restrained their applications in Microelectromechanical ...